We are currently experiencing intermittent issues impacting performance. We apologize for the inconvenience.
By Topic

Polymer-MEMS torsion mirror with large rotation angle and low driving voltage

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Dzung Viet Dao ; Ritsumeikan Univ., Kusatsu, Japan ; Amaya, S. ; Sugiyama, S.

This paper presents a novel fabrication of a monolithic PMMA torsional mirror utilizing hot embossing, surface-activated direct bonding, and the elliptical vibration cutting. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding micro structures. An efficient technique using reinforcement material to protect the PMMA microstructures during release process was proposed. Monolithic PMMA torsional mirror actuated by vertical comb actuator has been fabricated and tested successfully. Since the Young's modulus is 50 times lower than that of Si, the driving voltage of the PMMA actuator should be 7 times lower than that of silicon counterpart.

Published in:

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Date of Conference:

9-12 Aug. 2010