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A new fabrication technique for integrating silica optical devices and MEMS

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4 Author(s)
Grutter, K.E. ; Berkeley Sensor & Actuator Center (BSAC), Univ. of California, Berkeley, CA, USA ; Yeh, A.M. ; Patra, S.K. ; Wu, M.C.

We have developed a novel fabrication process which integrates silicon MEMS actuators with silica optical components. Suspended silica optical waveguides are actuated by a silicon electrostatic comb drive actuator, with a maximum displacement of 8 μm at 35 V bias.

Published in:

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Date of Conference:

9-12 Aug. 2010