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Torsional mirror driven by a cantilever beam integrated with 1×10 individually biased PZT array actuator for VOA application

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3 Author(s)
Koh, K.H. ; Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore ; Kobayashi, T. ; Chengkuo Lee

A gold coated silicon mirror (5mm × 5mm) actuated by 1×10 piezoelectric Pb(Zr, Ti)O3 (PZT) array actuator integrated on a cantilever beam has been demonstrated for variable optical attenuator (VOA) application. Torsional attenuation based on the difference in the dc biasing voltage applied to the 1×10 PZT array actuator was investigated. The dynamic attenuation range of 40dB at 1.8V DC bias is observed in the attenuation curve.

Published in:
Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Date of Conference: 9-12 Aug. 2010

Page(s):
119 - 120
E-ISBN :
978-1-4244-8925-1
Print ISBN:
978-1-4244-8926-8
INSPEC Accession Number:
11699392
Conference Location :
Sapporo
Digital Object Identifier :
10.1109/OMEMS.2010.5672154
Product Type:
Conference Publications

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