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Fabrication and evaluation of piezoelectric drive type 2-axis tilt control device using epitaxial PZT thin film

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4 Author(s)
Ozaki, K. ; Toyohashi Univ. of Technol., Toyohashi, Japan ; Akai, D. ; Sawada, K. ; Ishida, M.

Piezoelectric drive type 2-axis tilt control device using epitaxial Pb(Zr0.52, Ti0.48)O3 (PZT) thin film on epitaxial γ-Al2O3/Si substrate have been fabricated. A 500 nm-thick epitaxial PZT(111) thin film was sol-gel deposited on epitaxial SrRuO3(111)/Pt(111)/ γ-Al2O3(111)/Si(1 11) substrates, and hollow structure under actuate area was formed by XeF2 gas etching. The fabricated device showed polarization-electric field (P-E) hysteresis loop of piezoelectric PZT thin film and the deflection. Therefore, the realization of piezoelectric drive type deformable mirrors (DMs) using epitaxial PZT thin film can be expected.

Published in:

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Date of Conference:

9-12 Aug. 2010