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X-ray imaging test for a single-stage MEMS X-ray optical system

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19 Author(s)
Mitsuishi, I. ; Inst. of Space & Astronaut. Sci. (ISAS), Japan Aerosp. Exploration Agency (JAXA), Sagamihara, Japan ; Ezoe, Y. ; Ishizu, K. ; Moriyama, T.
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An X-ray imaging test for an X-ray optical system based on MEMS technologies was conducted at the ISAS 30 m beamline. An X-ray reflection and focusing were successfully verified at Al Kα 1.49 keV for the first time. The image quality estimated as a half power diameter was ~20 arcmin. This was consistent with the angular resolution estimated from the surface roughness of 200 nm rms at 100 μm scale. In this paper, the experimental setup and the result of X-ray imaging analysis are reported.

Published in:

Optical MEMS and Nanophotonics (OPT MEMS), 2010 International Conference on

Date of Conference:

9-12 Aug. 2010

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