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We successfully achieved the reduction of the parasitic resistance and the mobility enhancement in Si nanowire transistors (NW Tr.) by raised source/drain extensions with thin spacer (<;10nm) and by stress induced from heavily-doped gate. Id variations are suppressed by the spacer thinning. By adopting <;100> NW channel instead of <;110> NW, Ion = 1 mA/μm for Ioff = 100 nA/μm is achieved without stress techniques. Parasitic capacitance increase due to the spacer thinning is minimal. Heavily-doped poly-Si gate induces vertically compressive strain in NW, lon increase of 43% is achieved by the additive strain effect of heavily-doped poly-Si gate and tensile stress liner.
Date of Conference: 1-4 Nov. 2010