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This paper presents a theoretical study on the possible realization of high frequency ultrasonic phased array transducer (f > 100 MHz) using MEMS technologies. A silicon based lithium niobate (LiNbO3) single crystal linear array is considered. Finite element method is employed for the simulation optimization design of such device. Continuous wave beam steering, focusing under different array and matching conditions are simulated and the beam performance is analyzed. The inter-element cross-talking and the element electrical impedance are also calculated.
Date of Conference: 1-4 Nov. 2010