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High-resolution X-ray microdiffraction analysis of local strain in semiconductor materials

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4 Author(s)
Kimura, Shigeru ; Res. & Utilization Div., Japan Synchrotron Radiat. Res. Inst., Sayo, Japan ; Imai, Yasuhiko ; Sakata, Osami ; Sakai, Akira

We have developed new microdiffraction system at the SPring-8. This system used a focused beam produced using a phase zone plate combined with a narrow slit, which made a focused beam with a small size and a small angular divergence. Furthermore we can use the two-dimensional x-ray CCD detector, which enable us to measure local reciprocal space maps at many points in a sample, that is, the distribution of strain fields and lattice tilts can be revealed in high-angular- and high-spatial-resolution.

Published in:

Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on

Date of Conference:

1-4 Nov. 2010