Notification:
We are currently experiencing intermittent issues impacting performance. We apologize for the inconvenience.
By Topic

Integrated CMOS Sensor Array for Optical Heterodyne Phase Sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

7 Author(s)
Furth, P.M. ; Analog & Mixed Signal VLSI Lab., New Mexico State Univ., Las Cruces, NM, USA ; Ponnapureddy, V. ; Dundigal, S.R. ; Voelz, D.G.
more authors

A heterodyne interferometric CMOS 8 × 8 phase sensor array was developed to measure the spatial phase distribution of an optical wavefront. This sensor is suitable for measuring rapidly changing surface profiles and characterizing fast turbulence. Using an acousto-optic modulation frequency of 80 MHz and beat frequency of 10 kHz, the system calculates 8-bit phase data at each location in the array at a rate equal to the beat frequency. The phase computation is performed locally, digitized, and stored in 8-bit SRAM. Implemented in a 0.5-μm 2P3M CMOS process, the measured RMS phase error is 1.49° (1 LSB) and mismatch has σ = 4.76° (3.4 LSB). Experimental results, in agreement with theory, validate the proposed approach.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 6 )