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The compound oxides based on TiO2 and NiO thin films for low temperature gas detection

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9 Author(s)
I. Kosc ; Department of Microelectronics, Slovak University of Technology, Ilkovicova 3, SK-812 19 Bratislava, Slovakia ; I. Hotovy ; M. Kompitsas ; R. Grieseler
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The multilayer compound thin films, consisted of metal oxides (TiO2 and NiO) prepared by dc magnetron sputtering technique, have been studied. The structural, compositional, electrical and gas sensing properties have been investigated by XRD, GDOES and Van der Pauw method considering changes in layout, annealing temperature and addition of Au noble metal catalyst. The Au modified compound oxides exhibit fast response and enhanced sensitivity to hydrogen at low operating temperatures.

Published in:

Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on

Date of Conference:

25-27 Oct. 2010