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The compound oxides based on TiO2 and NiO thin films for low temperature gas detection

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9 Author(s)
Kosc, I. ; Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia ; Hotovy, I. ; Kompitsas, M. ; Grieseler, R.
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The multilayer compound thin films, consisted of metal oxides (TiO2 and NiO) prepared by dc magnetron sputtering technique, have been studied. The structural, compositional, electrical and gas sensing properties have been investigated by XRD, GDOES and Van der Pauw method considering changes in layout, annealing temperature and addition of Au noble metal catalyst. The Au modified compound oxides exhibit fast response and enhanced sensitivity to hydrogen at low operating temperatures.

Published in:
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on

Date of Conference: 25-27 Oct. 2010

Page(s):
337 - 340
Print ISBN:
978-1-4244-8574-1
INSPEC Accession Number:
11697718
Conference Location :
Smolenice
Digital Object Identifier :
10.1109/ASDAM.2010.5666355
Product Type:
Conference Publications

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