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Preparation and properties of ZnO nanomaterials for sensoric applications

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6 Author(s)
T. Brath ; Department of Microelectronics, Slovak University of Technology in Bratislava, Slovakia ; D. Búc ; M. Čaplovičová ; L. Čaplovič
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ZnO nanorods were grown on SiO2 substrates using a two-step process. In the first step, the formation of seed layers was performed. In the second step, the growth of nanorods above the seeds was carried out via three different methods. The used methods were magnetron sputtering and two types of hydrothermal methods. The obtained nanomaterial was characterized by scanning electron microscopy and X-ray diffraction. A gas sensor was then prepared using the combination of these techniques and some chosen characteristics of this sensor were measured.

Published in:

Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on

Date of Conference:

25-27 Oct. 2010