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Effect of substrate temperature on oblique-angle sputtered ZnO:Ga thin films

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8 Author(s)
Novotny, I. ; Dept. of Microelectron., Slovak Univ. of Technol., Bratislava, Slovakia ; Kotorová, D. ; Flickyngerová, S. ; Tvarožek, V.
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A study of the effect of substrate temperature on oblique-angle sputtered galium-doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 × 10-3 Ωcm together with an increase of their optical transmittance over 90%.

Published in:

Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on

Date of Conference:

25-27 Oct. 2010