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Variable RF MEMS fluidic inductor incorporating lamination process

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8 Author(s)
El Gmati, I. ; LAAS, Univ. de Toulouse, Toulouse, France ; Calmon, P. ; Fulcrand, R. ; Pons, P.
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A variable inductor based on liquid tuning has been fabricated and characterised. The fabrication process used SU-8 channel obtained by spin coating and lamination. A 107% tuning range with high inductance from 5.4 to 2.6 nH is achieved. With no actuation, the peak quality factor is 12, and the self-resonance frequency is 4 GHz.

Published in:

Micro & Nano Letters, IET  (Volume:5 ,  Issue: 6 )