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Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load

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5 Author(s)
Yinfang Zhu ; Inst. of Semicond., Chinese Acad. of Sci., Beijing, China ; Fengxin Zhang ; Jinling Yang ; Haiyang Zheng
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The stability of mechanical properties of submicrometer-thick cantilevers was systematically investigated under different conditions: driving force, vacuum, humidity, and temperature. For the submicrometer-thick cantilever, the cyclic test did not lead to failure but resulted in distinguish resonant frequency shift. The frequency shift is caused by fatigue stress, adsorption/desorption, and temperature-induced lever softening effect. At a vacuum of 10-3 Pa, the stress change makes a dominant contribution to the frequency shift, and the desorption induced lever softening is a secondary factor. The resonant fre quency continuously goes down with the cycles, and this frequency shift increases with the driving force of the lever. At a vacuum of 1 Pa, the resonant frequency is nearly unchanged until 109 cycles. Humid air accelerates water adsorption and dramatically enhances the lever stiffness, resulting in frequency increase. At room temperature, the Q factors of the lever change a little with the cycles in spite of the frequency decrease. At elevated temperature (100°C and 200°C), the frequency and Q factors increase with the cycles due to the dominant desorption.

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Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 1 )