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Porous silicon ethanol vapor sensor

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3 Author(s)
Y. C. Bow ; Dept. of Electr. & Electron. Eng., Hong Kong Univ. of Sci. & Technol., Clear Water Bay, Hong Kong ; W. M. Kwok ; M. C. Poon

A novel very-large-scale-integrable porous Si based ethanol vapor sensor will be presented. It has simple structure, high sensitivity, fast and stable response for ethanol vapor sensing at room environment. To explain the sensor results, a model based on the interaction of adsorbed ethanol molecules and the porous Si layer will also be proposed

Published in:

Electron Devices Meeting, 1996., IEEE Hong Kong

Date of Conference:

29 Jun 1996