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Simple confocal thickness gauge based on fibre-optic confocal sensor for non-contact measurement

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2 Author(s)
Kim, D.-H. ; Center for Devices & Radiol. Health, U.S. Food & Drug Adm., Silver Spring, MD, USA ; Ilev, I.K.

A simple non-contact thickness measurement method based on a dual-confocal microscope has been developed and tested. A reference comparison method was adapted for calibration of the system. The high accuracy potential of the method was demonstrated by measuring the thickness of transparent samples and a non-transparent soft biological sample. Lensed-tip fibre-optic confocal sensors were tested for the method.

Published in:

Electronics Letters  (Volume:46 ,  Issue: 24 )