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Characterization of Microdose Damage Caused by Single Heavy Ion Observed in Trench Type Power MOSFETs

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5 Author(s)
Kuboyama, S. ; Japan Aerosp. Exploration Agency, Tsukuba, Japan ; Maru, A. ; Ikeda, N. ; Hirao, T.
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It was demonstrated that anomalously large degradation observed in power MOSFETs was caused by a single heavy ion. It was identified as a microdose effect and successfully characterized by several parameters extracted from the experimental data.

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Nuclear Science, IEEE Transactions on  (Volume:57 ,  Issue: 6 )