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Micromachined scanning proximal probes with integrated piezoresistive readout and bimetal actuator for high eigenmode operation

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10 Author(s)
Woszczyna, Mirosław ; Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, ul. Janiszewskiego 11/17, 50-372 Wrocław, Poland ; Zawierucha, Paweł ; Pałetko, Piotr ; Zielony, Michał
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The fabrication process, application, and properties of a novel piezoresistive multiprobe with an integrated thermal tip deflection actuator are described in this article. The optimized fabrication process of the microprobe enables high-frequency sensor operation and integration of a high sharp conical tip, which was additionally covered with titanium using atomic layer deposition to improve mechanical endurance and ensure electrical conductivity. This microprobe was applied in high-resolution self-assembled monolayer surface investigations in which the piezoresistive cantilever with the integrated thermal deflection actuator was excited at two of its flexural-resonant eigenmodes. The excited second eigenmode and phase show different contrasts com-pared with images recorded at the first eigenmode.

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Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:28 ,  Issue: 6 )