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Tuning fork based in situ SEM nanorobotic manipulation system for wide range mechanical characterization of ultra flexible nanostructures

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5 Author(s)
Acosta, Juan Camilo ; Inst. des Syst. Intelligents et de Robot., Univ. Pierre et Marie Curie, Paris, France ; Gilgueng Hwang ; Thoyer, F. ; Polesel-Maris, J.
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In this article, a nanorobotic manipulation system under Scanning Electron Microscope (SEM) is developed for mechanical property characterization of ultra flexible nano-structures. Frequency modulated quartz tuning fork is proposed as gradient force sensing. Helical Nanobelts (HNB) were used as example to demonstrate the capabilities of the proposed system. The stiffness of HNBs were obtained in full tensile elongation experiments, ranging from 0.009 N/m at rest position to 0.297 N/m at full elongation before breaking with a resolution of 0.0031 N/m. The non-linear behavior of the HNB's measured stiffness is clearly revealed for the first time in full range. Furthermore, the stiffness could be transformed into force measurement that ranges from 14.5 nN to 2.96 μN.

Published in:

Intelligent Robots and Systems (IROS), 2010 IEEE/RSJ International Conference on

Date of Conference:

18-22 Oct. 2010