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This paper has analyzed the efficiency and the factors of Chinese university science parks using the DEA-Tobit model by the cross-section data in 2008. The results show: 21 university science parks are inefficient DMUs, and amongst 16 of them are ineffective vrste, five are ineffective scale. To improve the efficiency of the university science parks, the former should start with the vrste, namely they should maximize the outputs with appropriate inputs. The latter should start with the scale, namely they should improve efficiency by changing the production scale. The Tobit analysis indicates that the personnel quality, the fund intensity is positively related to crste respectively and the R&D area ratio is negatively related to crste. At the same time, only personnel quality is positively related to vrste.