By Topic

Three-Dimensional Shell Fabrication Using Blow Molding of Bulk Metallic Glass

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

6 Author(s)
Sarac, B. ; Dept. of Mech. Eng. & Mater. Sci., Yale Univ., New Haven, CT, USA ; Kumar, Golden ; Hodges, T. ; Ding, Shiyan
more authors

A blow molding method based on thermoplastic forming of bulk metallic glasses (BMGs) is used to fabricate 3-D microshells. The 3-D microshells are attached to the Si wafer through mechanical locking, which is achieved in the same processing step. Versatile sizes and shapes of the 3-D shells can be precisely controlled. High strength ( >; 1 GPa), elasticity (~ 2%), and controlled surface roughness (<; 2 nm), which are achievable for BMGs, suggest their potential use in devices, including resonators, microlenses, microfluidic, and packaging.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 1 )