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Three-Dimensional Shell Fabrication Using Blow Molding of Bulk Metallic Glass

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6 Author(s)
Sarac, B. ; Dept. of Mech. Eng. & Mater. Sci., Yale Univ., New Haven, CT, USA ; Kumar, Golden ; Hodges, T. ; Ding, Shiyan
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A blow molding method based on thermoplastic forming of bulk metallic glasses (BMGs) is used to fabricate 3-D microshells. The 3-D microshells are attached to the Si wafer through mechanical locking, which is achieved in the same processing step. Versatile sizes and shapes of the 3-D shells can be precisely controlled. High strength ( >; 1 GPa), elasticity (~ 2%), and controlled surface roughness (<; 2 nm), which are achievable for BMGs, suggest their potential use in devices, including resonators, microlenses, microfluidic, and packaging.

Published in:

Microelectromechanical Systems, Journal of  (Volume:20 ,  Issue: 1 )