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Study of controlled growth of carbon nanotubes in microstructures at low temperature

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4 Author(s)
Yang, D. ; State Key Lab. of Optoelectron. Mater. & Technol., Sun Yat-sen Univ., Guangzhou, China ; Jun Chen ; Deng, S.Z. ; Xu, N.S.

In this paper, thermal-catalytic chemical vapor deposition (thermal-CVD) is used to improve the quality of carbon nanotubes (CNTs) by varying the thickness of catalyst (Ni), processing time of the hydrogen treatment, flow rate of reaction gas (C2H2). And also the properties of CNTs on different buffer layers (W,Ti, etc) in microstructures on glass substrates are studied. The grown CNTs are examined by scanning electron microscopy (SEM) and the field emission properties are presented.

Published in:

Vacuum Electron Sources Conference and Nanocarbon (IVESC), 2010 8th International

Date of Conference:

14-16 Oct. 2010