Skip to Main Content
In this work, bamboo-shaped CNTs were successfully fabricated by PECVD using ZnO:Co thin film as catalyst. ZnO:Co nanoclusters were produced by a nanocluster-beam deposition system. Briefly, a metal target consisting of 98% Zn and 2% Co was used with a sputtering power of 130 W. Ar, He and Oxygen gases were injected into the system with the corresponding total pressure of 0.75 Torr. A plasma enhanced chemical vapor deposition (PECVD) system was used to synthesize the CNTs. Before the CNTs growth, the mixture gases of ammonia and acetylene C2H2 were introduced into the system. The pressure inside the plasma chamber was maintained at 13 mbar. During the growth of CNTs, a 500 V of biased voltage was applied throughout the 15 min CNT growth process.