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Bulk silicon photonic wire for one-chip integrated optical interconnection

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14 Author(s)
Ho-Chul Ji ; Semicond. R&D Center, Samsung Electron., Yongin, South Korea ; Ha, K.H. ; Na, K.W. ; Kim, S.G.
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We report a nano-sized silicon waveguide by forming partial silicon-on-insulator structure with SPE on bulk silicon substrate. The propagation loss is as low as 6.1 dB/cm, which is close to that of silicon-on-insulator based waveguide.

Published in:

Group IV Photonics (GFP), 2010 7th IEEE International Conference on

Date of Conference:

1-3 Sept. 2010