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Widely tunable high-speed bulk-micromachined short-wavelength MEMS-VCSEL

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12 Author(s)
Davani, H.A. ; Dept. of Microwaves & Opt., Tech. Univ. Darmstadt, Darmstadt, Germany ; Grasse, C. ; Kögel, B. ; Westbergh, P.
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We present the first results of a high-speed bulk-micromachined tunable vertical-cavity surface-emitting laser (VCSEL) operating near 850nm using a half-symmetric resonator with a movable curved microelectromechanical system (MEMS) membrane.

Published in:

Semiconductor Laser Conference (ISLC), 2010 22nd IEEE International

Date of Conference:

26-30 Sept. 2010