By Topic

Effect of Pocket Doping and Annealing Schemes on the Source-Pocket Tunnel Field-Effect Transistor

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Ritesh Jhaveri ; Department of Electrical Engineering, University of California, Los Angeles, CA, USA ; Venkatagirish Nagavarapu ; Jason C. S. Woo

Low operating power is an important concern for sub-45-nm CMOS integrated circuits. Scaling of devices to below 45 nm leads to an increase in active power dissipation (CV2.f) and subthreshold power (IOFF.VDD)Hence, new device innovations are being explored to address these problems. In this paper, we simulate and experimentally investigate the source-pocket tunnel field-effect transistor (TFET), which is based on the principle of band-to-band tunneling, p-i-n and source-pocket TFETs are fabricated with different pocket conditions to observe the effect of the source-side pocket on device performance. Different annealing schemes (spike and conventional rapid thermal annealing) are used to study the effect of annealing conditions on TFET performance. The source-pocket TFET shows a higher ION (~10 times) and steeper subthreshold swing as compared to a p-i-n TFET. The ambipolar conduction is also reduced by using a low-doped drain extension. Low-temperature measurements of the source-pocket TFET were performed, and the subthreshold swing of the source-pocket TFET shows very little temperature dependence, which confirms the dominant source injection mechanism to be band-to-band tunneling.

Published in:

IEEE Transactions on Electron Devices  (Volume:58 ,  Issue: 1 )