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Fabrication of single-walled carbon nanotubes (SWNTs) field-effect transistor (FET) biosensor

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4 Author(s)
Danna Yang ; Sch. of Chem. Eng., Sichuan Univ., Chengdu, China ; Lin Wang ; Qiang Zhao ; Sai Li

Due to their unique electrical, geometrical, mechanical and biocompatible properties, single-walled carbon nanotubes (SWNTs) are attractive materials for the construction of nanoscale field-effect transistor (FET) biosensors. At present, biosensors based on CNTFET are required in various applications, including clinical diagnostics, environmental testing, food analysis, and bioterrorism detection technologies. In this paper, we report the fabrication of carbon nanotube field-effect transistors (CNTFETs), by applying AC Dielectrophoresis (ACDEP) method to deposit and align SWNTs across the source and drain of CNTFETs to form the conductive channel. By controlling the experimental condition, we can connect the electrodes with many bundles of SWNTs, and with the transfer characteristics, we known the fabricated FET has good performance in electronic properties.

Published in:

Biomedical Engineering and Informatics (BMEI), 2010 3rd International Conference on  (Volume:4 )

Date of Conference:

16-18 Oct. 2010