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In this paper, the circuit design of a resonant inverter for plasma-driven system is studied. Based on the half-bridge inverter structure, the proposed circuit has included the soft-switching techniques so that the investment on heat dissipation can be greatly saved. Moreover, this paper has investigated plasma power control under different conditions. Via the developed control circuit to formulate the relationships between the output power and voltage as a quadratic function, the output power of the system can then be controlled and becomes insensitive to plasma voltage variations. In order to solidify the practicality of this circuit design, mathematical analyses and experimental validations have been thoroughly performed. Test results help confirm the effectiveness of the method, demonstrating its feasibility and practicality for high-frequency-drive industry applications.
Date of Publication: Sept. 2011