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A scheduling method in semiconductor manufacturing lines based on genetic algorithm and simulated annealing algorithm

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4 Author(s)
Tang Chun-hui ; Sch. of Opt.-Electr. & Comput. Eng., Univ. of Shanghai for Sci. & Technol., Shanghai, China ; Qian Yu-Liang ; Zhu Jun ; Yan Shu-jia

Semiconductor manufacturing is one of the most complex manufacturing process. And job scheduling is a major problem in the semiconductor operation. A method of job scheduling in semiconductor manufacturing lines is proposed based on genetic algorithm and simulated annealing algorithm. Firstly each job is given a set of machine processing set* based on genetic algorithm, then the processing sequence of each machine can be arranged based on simulated annealing. This paper presents the reason and the solution in detail. The Minifab model is solved by the method and the result proves that this method is effective.

Published in:

Information Networking and Automation (ICINA), 2010 International Conference on  (Volume:1 )

Date of Conference:

18-19 Oct. 2010

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