By Topic

Adaptive Impedance Matching System

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Yang Li ; Coll. of Electr. &Inf. Eng., Southwest Univ. for Nat., Chengdu, China ; Du Cheng

In order to resolve the real-time, fast and stable matching problems as to the dynamic load of microwave plasma, including O2, N2, CF4, NF3, N2H2, etc, through the introduction of six-port test theory and impedance matching theory, the authors put forward a new method called automatic impedance match, which calculated reflectance using the FDTD algorithm. And they use the relationship between pin insertion depth and reflectance of port surface under HFSS simulation automatic impedance matching system to make pin insertion depth and port reflectance form corresponding relation. In the impedance matching system, use the corresponding relation so as to minimize the reflectance, and adjust pin insertion depth into the best position to achieve fast matching in impedance system. As simulation results indicate that the load impedance standing wave factor variation ranges in 0-10, the standing wave ratio (VSWR) of port could basically meet the engineering requirements.

Published in:

Information Technology and Applications (IFITA), 2010 International Forum on  (Volume:3 )

Date of Conference:

16-18 July 2010