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We report the hydrogen sensing properties of a sensor using TiO2 nanotube arrays. The TiO2 nanotube arrays were fabricated by anodization on titanium foil, in an electrolyte containing 0.5 wt% hydrofluoric acid mixed with water, the electric potential being 15V. TiO2 nanotube arrays were annealed at 600 Celsius for 1 h. The sensors were equipped with platinum electrodes. These two were connected with a metal wire using silver paste. The measurements of the sensor's electrical resistance were performed in NTP. The hydrogen sensor using TiO2 nanotube arrays shows a linear sensitivity with various hydrogen concentrations. After repeating exposure to hydrogen at room temperature, the sensor's resistance indicated a stable recovery to its initial resistance. The reproducibility of this exam is reliable.
Electronics Conference (BEC), 2010 12th Biennial Baltic
Date of Conference: 4-6 Oct. 2010