Scheduled System Maintenance:
On Wednesday, July 29th, IEEE Xplore will undergo scheduled maintenance from 7:00-9:00 AM ET (11:00-13:00 UTC). During this time there may be intermittent impact on performance. We apologize for any inconvenience.
By Topic

Analyzing UV/Vis/NIR Spectra—Addition of Oxygen and Nitrogen to ZnO:Al Thin Films

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Stadler, A. ; Univ. of Salzburg, Salzburg, Austria ; Stòˆllinger, J. ; Dittrich, H.

Exact optical analysis of transparent-conductive-oxide (TCO) thin films are necessary to optimize adequate materials for optical sensor and solar cell applications. A non-numerical theoretical concept has been used to extract approximation-free optical, structural and electrical data from ultraviolet/visible/near-infrared (UV/Vis/NIR) spectra. Special focus has been set on double-layer systems, as thin films upon substrates. Complex parameter evaluation is possible. Sputtered aluminum-doped zinc-oxide (ZnO: Al) thin films have been analyzed with respect to oxygen and nitrogen additions to the inert argon process-gas. Based on UV/Vis/NIR spectra and a novel analysis model, complex optical, structural and electrical data have been evaluated for these transparent-conductive-oxide (TCO) layers. Correct extracted physical values as refractive indices, permittivities, absorption coefficients, deposition rates, conductivities and band gap energies allow a reliable dimensioning for optical sensor and solar cell designs. Results are compared with those of the well-known Keradec/Swanepoel model (KSM). The necessity of taking both spectra-transmission and reflection spectra-into account was shown. Results are discussed with structural properties of the thin films, by help of XRD-measurements. A noncontact, optical conductivity measurement possibility by use of UV/Vis/NIR spectroscopy has been shown. Optically measured conductivities have been compared with electrically measured ones.

Published in:

Sensors Journal, IEEE  (Volume:11 ,  Issue: 4 )