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Design and Fabrication of Tb ^{3+} -Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications

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4 Author(s)
Hoon Jeong ; Department of Physics, KAIST, Daejeon, Korea ; Shinyoung Lee ; Gun Yong Sung ; Jung H. Shin

We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-μm diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated.

Published in:

IEEE Photonics Technology Letters  (Volume:23 ,  Issue: 2 )