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Strain evaluation in AlInN/GaN Bragg mirrors by in situ curvature measurements and ex situ x-ray grazing incidence and transmission scattering

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7 Author(s)
Krost, A. ; Institut für Experimentelle Physik, Fakultät für Naturwissenschaften, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39016 Magdeburg, Germany ; Berger, C. ; Blasing, J. ; Franke, A.
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Strain in lattice matched and mismatched AlInN/GaN Bragg mirror structures were studied by in situ curvature and various ex situ x-ray measurements. In the case of lattice mismatched structures considerable deviations of the in-plane lattice parameters were evidenced near the surface region as well as in depth using x-ray grazing incidence and x-ray transmission scattering in Laue geometry. The experimental findings are explained in terms of partial stress relaxation of the AlInN/GaN Bragg layer stack with respect to the underlying GaN buffer and a mutual tensioning of the GaN and AlInN layers with respect to each other.

Published in:

Applied Physics Letters  (Volume:97 ,  Issue: 18 )

Date of Publication:

Nov 2010

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