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Fabrication of magnetic nanostructures using atomic force microscopy

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5 Author(s)

Local anodic oxidation (LAO) of nickel, iron and cobalt films is experimentally studied. Most easy and efficient oxidation was found for iron where as the best repeatability was achieved for nickel films in the experiment. Threshold and optimal parameters for LAO on nickel and iron were determined.

Published in:

Actual Problems of Electron Devices Engineering (APEDE), 2010 International Conference on

Date of Conference:

22-23 Sept. 2010