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A temperature sensor intended for RFID applications has been realized in a 0.16μm standard CMOS process. After a single digital trim at 30°C, it achieves an inaccuracy of ±0.2°C (3σ) over the temperature range: -30°C to 125°C. At a conversion rate of 10Hz, it achieves a resolution of 15mK. The sensor is compact, occupying only 0.12mm2, and power efficient, drawing 4.6μA from a 1.6V to 2V supply, which corresponds to a minimum power dissipation of 7.4μW, the lowest ever reported for a precision temperature sensor.