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An EMI Camera LSI (EMcam) with a 12 × 4 on-chip 250μm × 50μm loop antenna matrix in 65nm CMOS is developed. EMcam achieves both the 2D electric scanning and 60μm-level spatial precision for the first time. The down-conversion architecture increases the bandwidth of EMcam and enables the measurement of EMI spectrum. Shared IF block scheme is proposed to alleviate the increasing power and area penalty inherent to the matrix measurement. `Mixer and antenna selector (MAS)' reduces the switches and prevents the EMI attenuation due to the switches. EMI measurement with the smallest 32μm × 12μm antenna to date is also demonstrated.