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Infrared Pulsed Laser Deposition of Niobium Nitride Thin Films

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5 Author(s)
S. Chaudhuri ; Nanoscience Center, Department of Physics, University of Jyväskylä, Jyväskylä, Finland ; M. R. Nevala ; T. Hakkarainen ; T. Niemi
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We have successfully fabricated superconducting niobium nitride thin films on single crystals of magnesium oxide using a pulsed laser deposition technique where 1064 nm (photon energy ~1.16 eV) laser pulses from an Nd:YAG laser were used for ablation. A correlation between the superconducting transition temperature, the nitrogen base pressure during deposition and the lattice parameter of the produced NbN films was observed. Superconductor-insulator-normal metal junctions fabricated using these NbN films as the superconductor revealed nonlinear electrical characteristics at 4.2 K associated with quasiparticle tunneling.

Published in:

IEEE Transactions on Applied Superconductivity  (Volume:21 ,  Issue: 3 )