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Design, packaging and reliability aspects of RF MEMS circuits fabricated using a GaAs MMIC foundry process technology

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10 Author(s)
Malmqvist, R. ; FOI Swedish Defence Res. Agency, Linköping, Sweden ; Samuelsson, C. ; Simon, W. ; Rantakari, P.
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In this paper, we report on recent results obtained within a pan-European research effort aiming at a successful integration of RF MEMS switches in a GaAs MMIC foundry process technology. Testing and characterization of GaAs based MEMS switches and RF circuits show promising results with respect to switch cycling tests, micro-seconds switching times and the relatively low losses demonstrated up to millimetre-wave frequencies. Compact GaAs RF MEMS based phase shifters together with a possible packaging solution are also presented.

Published in:

Microwave Conference (EuMC), 2010 European

Date of Conference:

28-30 Sept. 2010