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Wide frequency range high resolution THz spectroscopy with using continuous-wave GaP terahertz signal generator and its application to defect detection

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3 Author(s)
Sasaki, T. ; Semicond. Res. Inst., Sophia Univ., Tokyo, Japan ; Nishizawa, J. ; Tanabe, T.

We developed automatic scanning GaP continuous wave terahertz Signal Generator and Spectrometer. The features of the spectrometer are higher resolution, wider dynamic range, higher measurement speed, smaller size, easier operation, easier maintenance, and lower cost compared with the spectrometer using pulse-type THz Signal Generator as a light source.

Published in:

Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on

Date of Conference:

5-10 Sept. 2010