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THz uncooled microbolometer array development for active imaging and spectroscopy applications

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7 Author(s)
Simoens, F. ; CEA Leti-MINATEC, Grenoble, France ; Meilhan, J. ; Pocas, S. ; Ouvrier-Buffet, J.-L.
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A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification.

Published in:

Infrared Millimeter and Terahertz Waves (IRMMW-THz), 2010 35th International Conference on

Date of Conference:

5-10 Sept. 2010