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In this paper, we describe the results of our effort in fabricating the ferroelectric coplanar phase shifters on three different substrates using a vacuum sputter system. We further characterize the resulting phase shift performances as a function of frequency and with different values of bias voltages. This paper also describes the fabrication procedures of ferroelectric phase shifters and discusses the characterization methods of the fabricated devices. Measurement data are presented and compared with simulated results for verification.