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A double-mode piezoelectric single-crystal ultrasonic micro-actuator

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4 Author(s)
Mingsen Guo ; Dept. of Adv. Mater. & Nanotechnol., Peking Univ., Beijing, China ; Shuxiang Dong ; Ren, Bo ; Haosu Luo

Ternary Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 (PIN-PMN-PT) single crystals with higher coercive field (EC ~9 kV/cm) and higher ferroelectric-transition temperature (TR-T = 108°C) were grown, and correspondingly, a double-mode piezoelectric ultrasonic micro-actuator made of PIN-PMN-PT crystal brick (5 × 1.5 × 1.32 mm) and operated in the first longitudinal and the second bending modes was developed. The ferroelectric, dielectric, electromechanical, and resonance displacement properties of the micro-actuator were characterized for miniature linear piezo-motor applications. The longitudinal displacement of the actuator is ~0.11 μm (with an applied voltage of 5 V), which is comparable to that of a multilayer piezoelectric-ceramic actuator of the same size. This crystal micro-actuator was successfully used to drive a slider moving linearly.

Published in:

Ultrasonics, Ferroelectrics, and Frequency Control, IEEE Transactions on  (Volume:57 ,  Issue: 11 )