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Quartz length-extension resonators have already been used to obtain atomically-resolved images by frequency-modulation atomic force microscopy. Other piezoelectric materials such as gallium orthophosphate (GaPO4), langatate (LGT), and langasite (LGS) could be appropriate for this application. In this paper, the advantages of langasite crystal are presented and the fabrication of similar microsensors in langasite temperature-compensated cuts by chemical etching is proved. A monolithic length extension resonator, with a tip at its end, is obtained which constitutes a real advantage in regard to the existing quartz devices.
Ultrasonics, Ferroelectrics and Frequency Control, IEEE Transactions on (Volume:57 , Issue: 11 )
Date of Publication: November 2010