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Realizing the frequency quality factor product limit in silicon via compact phononic crystal resonators

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6 Author(s)
Goettler, D. ; Department of Mechanical Engineering, University of New Mexico, Albuquerque, New Mexico 87131, USA ; Su, Mehmet ; Leseman, Z. ; Soliman, Y.
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High-Q (quality factor) resonators are a versatile class of components for radio frequency micro-electromechanical systems . Phononic crystals provide a promising method of producing these resonators. In this article, we present a theoretical study of the Q factor of a cavity resonator in a two-dimensional phononic crystal comprised of tungsten rods in a silicon matrix. One can optimize the Q of a phononic crystal resonator by varying the number of inclusions or the cavity harmonic number. We conclude that using higher harmonics marginally increases Q while increasing crystal length via additional inclusions causes Q to increase by orders of magnitude. Incorporating loss into the model shows that the silicon material limit on Q is achievable using a two-dimensional phononic crystal design with a reasonable length. With five layers of inclusions on either side of the cavity, the material limit on Q is achieved, regardless of the harmonic number.

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Journal of Applied Physics  (Volume:108 ,  Issue: 8 )