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Demonstration of an All-Sapphire Fabry–Pérot Cavity for Pressure Sensing

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4 Author(s)
Yi, Jihaeng ; Bradley Dept. of Electr. & Comput. Eng., Virginia Tech., Blacksburg, VA, USA ; Lally, E. ; Anbo Wang ; Yong Xu

This letter presents a first demonstration of a monolithic sapphire Fabry-Pérot (FP) cavity for pressure sensing. The prototype was constructed by combining reactive ion etching with direct wafer bonding. Long-term testing proves that the adhesive-free wafer bond is sufficient to create a sealed FP cavity as a pressure transducer. Pressure measurement over a range of 0.04-1.38 MPa has been demonstrated at room temperature using white-light interferometry. With an all-sapphire configuration, the prototype reported here can be further developed into a pressure sensor with high-temperature harsh-environment capability.

Published in:

Photonics Technology Letters, IEEE  (Volume:23 ,  Issue: 1 )