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Nano-level 3-D shape measurement method from analysis of interference fringes using RGB LED lightings

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6 Author(s)
Hata, S. ; Fac. of Eng., Kagawa Univ., Takamatsu, Japan ; Kaneda, M. ; Kimura, D. ; Morimoto, S.
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Nano-level 3-D measurement is one of the key technologies for the current and next generation of production systems for semi-conductors, LCDs and nano-devices. To meet with these applications, "Wide range nano-level 3-D shape measurement method using combination of RGB laser lights" has been developed. It measure the height of nano-objects from the combination of RGB LED lights combinations. To analyze the combination of RGB lights, the color analysis method on xy-color plane has been introduced. In this method, the color changes on xy-color plane means the height changes. Experimental system to measure the three micro-meter height has been developed, and succeeded to measure the 50 nm step and 500 nm step samples.

Published in:

SICE Annual Conference 2010, Proceedings of

Date of Conference:

18-21 Aug. 2010