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Resonant sensors by silicon micromachining

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1 Author(s)
M. Esashi ; Fac. of Eng., Tohoku Univ., Sendai, Japan

Micromachined silicon resonant sensors as infrared sensor, accelerometer, angular rate sensor and AFM probe were developed. The resonator is encapsulated in a vacuum chamber in a glass-silicon structure. Vibrating beams are driven electrostatically and their movements are detected capacitively

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996