By Topic

Resonant sensors by silicon micromachining

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Esashi, M. ; Fac. of Eng., Tohoku Univ., Sendai, Japan

Micromachined silicon resonant sensors as infrared sensor, accelerometer, angular rate sensor and AFM probe were developed. The resonator is encapsulated in a vacuum chamber in a glass-silicon structure. Vibrating beams are driven electrostatically and their movements are detected capacitively

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996