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Measurement of SAW velocity using impulse system and its application on NDE

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3 Author(s)
Nomura, T. ; Dept. of Electr. Commun.., Shibaura Inst. of Technol., Tokyo, Japan ; Wayashi, M. ; Yasuda, T.

Surface acoustic wave (SAW) devices use the characteristics of SAW propagations directly. Therefore, the characteristic SAW propagation on a piezoelectric substrate is very important for such a device. In this paper, a new method for measuring SAW velocity is described. The method uses the spectrum of impulse response of the interdigital transducer (IDT), which depends on the SAW velocity and electrode period. The velocity of the SAW in an isotropic layer on a piezoelectric substrate and single crystal substrate were measured nondestructively using the pulse method

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996