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The surface acoustic wave propagation characteristics of 41° lithium niobate with thin-film SiO2

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4 Author(s)
Hickernell, F.S. ; Motorola Gov. & Space Technol. Group, Scottsdale, AZ, USA ; Knuth, H.D. ; Dablemont, R.C. ; Hickernell, T.S.

The surface acoustic wave (SAW) propagation properties of 41° Y-X lithium niobate (LiNbO3) with SiO2 film layers have been investigated using interdigital transducer structures. Different thicknesses of SiO2 from 500 nm to 1500 nm were deposited on the 41° LiNbO3 by RF diode sputtering from a glass target. An arrayed transducer pattern of aluminum interdigital transducer electrodes on the upper SiO2 film surface facilitated the excitation of a wide frequency band of harmonic waves and permitted delineation of SAW velocity and propagation loss characteristics for several values of film-thickness to acoustic-wavelength (t/λ) ratio. With resonator patterns at the substrate/film interface, the capacitance ratio (Cm/C0 ), related to coupling factor, and the temperature coefficient of frequency (TCF) were determined

Published in:

Frequency Control Symposium, 1996. 50th., Proceedings of the 1996 IEEE International.

Date of Conference:

5-7 Jun 1996